EM-AFM

SEM compatible atomic force microscope

 

 

TNI EM-AFM is a high performance AFM for use inside SEM or ambient condition. Its state-of-the-art low-power design enables high speed, high resolution scanning with minimal thermal drift.  

SEM COMPATIBLE

Can be installed into most SEMs. Load-lock compatible version is available upon request.

NANOINDENTATION

Fully encoded motion provides high accuracy quanitiative nanomechanical measurements.

FULLY ENCODED MOTION

Integrated with encoders with sub-nanometer resolution for high accuracy measurements.

Quick Setup

Install/remove the system from the SEM in seconds. No dedicated SEM needed.

TOPOGRAPHY SCAN

Innovative low power design enables high speed, high resolution scanning inside vacuum environment.

ADD-ONS

Different cantilever for different applications.

 

   OVERVIEW

  • System Dimensions: 100 mm X 100 mm X 35 mm

  • Usable Environment: SEM high vacuum, ambient

  • Maximum sample size: 25 mm X 25 mm X 10 mm

  • Weight: 400 g + SEM adapter

 

   SCANNER

  • Coarse motion range: 15 mm in XY, 5 mm in Z

  • Coarse motion encoder resolution: 1 nm 

  • Fine motion range: 35 µm X 35 µm X 5 µm

  • Fine motion encoder resolution: 0.2 nm

   AFM SENSOR HEAD

  • Sensing principle: piezoresistive cantilever

  • Scanning mode: contact

  • Topography resolution: better than 0.2 nm

  • Force resolution: better than 5 nN

  • Force sensing range: +/- 200 µN

   SOFTWARE CAPABILITIES

  • Automated encoder calibration

  • Automated cantilever calibration

  • Centralize SEM and AFM control

  • Intuitive on-screen click-to-move

  • Data analysis tools

  • Highly programmable 

  • Picture/video recording

 
 

 APPLICATIONS

Topography Scan
nano manipulation,
nano robotics,
micro manipulation,
nanomanipulation system,
Toronto nano instrumentation,
TNI,
University of Toronto,
SEM compatible AFM,
nano force sensor,
semiconductor testing,
nanomechanics,
nanomaterial testing,
nano tensile,
nano probing
Mechanical Nanoindentation
nano manipulation,
nano robotics,
micro manipulation,
nanomanipulation system,
Toronto nano instrumentation,
TNI,
University of Toronto,
SEM compatible AFM,
nano force sensor,
semiconductor testing,
nanomechanics,
nanomaterial testing,
nano tensile,
nano probing
Automations
nano manipulation,
nano robotics,
micro manipulation,
nanomanipulation system,
Toronto nano instrumentation,
TNI,
University of Toronto,
SEM compatible AFM,
nano force sensor,
semiconductor testing,
nanomechanics,
nanomaterial testing,
nano tensile,
nano probing
Nanowire Measurements
nano manipulation,
nano robotics,
micro manipulation,
nanomanipulation system,
Toronto nano instrumentation,
TNI,
University of Toronto,
SEM compatible AFM,
nano force sensor,
semiconductor testing,
nanomechanics,
nanomaterial testing,
nano tensile,
nano probing
DNA Extraction
nano manipulation,
nano robotics,
micro manipulation,
nanomanipulation system,
Toronto nano instrumentation,
TNI,
University of Toronto,
SEM compatible AFM,
nano force sensor,
semiconductor testing,
nanomechanics,
nanomaterial testing,
nano tensile,
nano probing
Single Cell Mechanics
nano manipulation,
nano robotics,
micro manipulation,
nanomanipulation system,
Toronto nano instrumentation,
TNI,
University of Toronto,
SEM compatible AFM,
nano force sensor,
semiconductor testing,
nanomechanics,
nanomaterial testing,
nano tensile,
nano probing
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