SEM based Atomic Force Microscope Nanomanipulation
 

EM-AFM

SEM compatible atomic force microscope

 

 

TNI EM-AFM is a high performance AFM for use inside SEM or ambient condition. Its state-of-the-art low-power design enables high speed, high resolution scanning with minimal thermal drift.  

SEM COMPATIBLE

Can be installed into most SEMs. Load-lock compatible version is available upon request.

NANOINDENTATION

Fully encoded motion provides high accuracy quanitiative nanomechanical measurements.

FULLY ENCODED MOTION

Integrated with encoders with sub-nanometer resolution for high accuracy measurements.

Quick Setup

Install/remove the system from the SEM in seconds. No dedicated SEM needed.

TOPOGRAPHY SCAN

Innovative low power design enables high speed, high resolution scanning inside vacuum environment.

ADD-ONS

Different cantilever for different applications.

 

   OVERVIEW

  • System Dimensions: 100 mm X 100 mm X 35 mm

  • Usable Environment: SEM high vacuum, ambient

  • Maximum sample size: 25 mm X 25 mm X 10 mm

  • Weight: 400 g + SEM adapter

 

   SCANNER

  • Coarse motion range: 15 mm in XY, 5 mm in Z

  • Coarse motion encoder resolution: 1 nm 

  • Fine motion range: 35 µm X 35 µm X 5 µm

  • Fine motion encoder resolution: 0.2 nm

   AFM SENSOR HEAD

  • Sensing principle: piezoresistive cantilever

  • Scanning mode: contact

  • Topography resolution: better than 0.2 nm

  • Force resolution: better than 5 nN

  • Force sensing range: +/- 200 µN

   SOFTWARE CAPABILITIES

  • Automated encoder calibration

  • Automated cantilever calibration

  • Centralize SEM and AFM control

  • Intuitive on-screen click-to-move

  • Data analysis tools

  • Highly programmable 

  • Picture/video recording

 
 

 APPLICATIONS