TNI EM-AFM is a high performance AFM for use inside SEM or ambient condition. Its state-of-the-art low-power design enables high speed, high resolution scanning with minimal thermal drift.
SEM COMPATIBLE
Can be installed into most SEMs. Load-lock compatible version is available upon request.
NANOINDENTATION
Fully encoded motion provides high accuracy quanitiative nanomechanical measurements.
FULLY ENCODED MOTION
Integrated with encoders with sub-nanometer resolution for high accuracy measurements.
Quick Setup
Install/remove the system from the SEM in seconds. No dedicated SEM needed.
TOPOGRAPHY SCAN
Innovative low power design enables high speed, high resolution scanning inside vacuum environment.
ADD-ONS
Different cantilever for different applications.
OVERVIEW
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System Dimensions: 100 mm X 100 mm X 35 mm
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Usable Environment: SEM high vacuum, ambient
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Maximum sample size: 25 mm X 25 mm X 10 mm
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Weight: 400 g + SEM adapter
SCANNER
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Coarse motion range: 15 mm in XY, 5 mm in Z
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Coarse motion encoder resolution: 1 nm
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Fine motion range: 35 µm X 35 µm X 5 µm
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Fine motion encoder resolution: 0.2 nm
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AFM SENSOR HEAD
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Sensing principle: piezoresistive cantilever
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Scanning mode: contact
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Topography resolution: better than 0.2 nm
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Force resolution: better than 5 nN
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Force sensing range: +/- 200 µN
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SOFTWARE CAPABILITIES
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Automated encoder calibration
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Automated cantilever calibration
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Centralize SEM and AFM control
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Intuitive on-screen click-to-move
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Data analysis tools
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Highly programmable
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Picture/video recording
APPLICATIONS
