Nanoprobing is a key part of IC failure analysis. The task involves landing multiple probe tips gently on top of contacts that are only tens of nanometers in size or less, and perform I-V measurements. TNI system’s superb positioning performance and closed-loop control enable easier probing of nanoelectronics structures. With the integrated position sensors, TNI instrument has achieved automated positioning of nano probes for semiconductor chip testing, as shown in the video below.
C. Zhou, Z. Gong, B.K. Chen, M. Tan, and Y. Sun, "Closed-loop controlled nanoprobing inside scanning electron microscope," IEEE International Conf. on Nanotechnology, Toronto, Canada, Aug. 18-21, 2014.
Z. Gong, B.K. Chen, J. Liu, and Y. Sun, "Automated nanoprobing under scanning electron microscope," IEEE International Conf. on Robotics and Automation (ICRA2013), Karlsruhe, Germany, May 6-10, 2013.