Material Sciences

 
3D Topography Scan
 

The combination of SEM and AFM systems provides a powerful tool for obtaining accurate three-dimensional topography information.  SEM captures 2D images, by detecting secondary electrons and back-scattered electrons, at a high frame rate and high resolution to guide the AFM cantilever to a region-of-interest (ROI), within which AFM generates a detailed 3D topography.

Metrology Chip

Metrology Chip

DVD Surface

DVD Surface

 
Mechanical Nanoindentation
 

Nanoindentation permits quantitative nanomechanical measurement of a sample. By performing nanoindentation inside SEM, one can benefit from the use of SEM analytical tools (e.g., EDX and EBSD) to analyze materials and pin-point region of interest while visually observing the dynamic indentation process in real time. TNI EM-AFM utilizes proprietary position sensing technologies to ensure highly repeatable and accurate nanoindentation measurement.   

Mechanical Naoindentation nanomanipulation
nanomechanics
 
 
Nanowire Measurements
 

Nanomechanical properties of a single nanowire can be experimentally measured through various means. TNI EM-AFM, or TNI LF nanomanipulation system combined with the Nano Force Sensor module, is capable of performing highly accurate tensile, compression, and piezoresistive measurements inside SEM.  

Nanowire tensile/compression testing

Nanowire tensile/compression testing

MEMS based piezoresistive tester

MEMS based piezoresistive tester

Schematic

Schematic

Nanowire isolation from a bundle

Nanowire isolation from a bundle

Move nanowire to the tester

Move nanowire to the tester

Place nanowire across testing gap

Place nanowire across testing gap

Solder nanowire in place with EBID

Solder nanowire in place with EBID

  • Y. Zhang, X.Y. Liu, C.H. Ru, Y.L. Zhang, L.X. Dong, and Y. Sun, "Piezoresistivity characterization of synthetic silicon nanowires using a MEMS device," IEEE/ASME J. MEMS, Vol. 20, pp. 959-967, 2011.

 
 
Four-Point Electrical Probing

Four-point probing is used to measure material resistivity. One challenge in probing nano-scaled materials is the landing of four nano probes gently on the sample. Due to the lack of depth information from SEM imaging, probe-sample contact detection is a time consuming, skill dependent process that often results in probe/sample damage. TNI LF is the only commercial system that provides long-range, vibration free, flexure-guided positioning with position feedback. After probe-sample contact is established, the instrument can save the coordinates for future use. This eliminates the need to repeat the challenging probe-sample contact detection process.  

 

  • C.H. Ru, Y. Zhang, Y. Sun*, Y. Zhong, X.L. Sun, D. Hoyle, and I. Cotton, "Automated four-point probe measurement of nanowires inside a scanning electron microscope," IEEE Trans. on Nanotechnology, Vol. 10, pp. 674-681, 2011.

 
 
Nanowire Measurements
 

Nanomechanical properties of a single nanowire can be experimentally measured through various means. TNI EM-AFM, or TNI LF nanomanipulation system combined with the Nano Force Sensor module, is capable of performing highly accurate tensile, compression, and piezoresistive measurements inside SEM.  

Nanowire tensile/compression testing

Nanowire tensile/compression testing

MEMS based piezoresistive tester

MEMS based piezoresistive tester

Schematic

Schematic

Nanowire isolation from a bundle

Nanowire isolation from a bundle

Move nanowire to the tester

Move nanowire to the tester

Place nanowire across testing gap

Place nanowire across testing gap

Solder nanowire in place with EBID

Solder nanowire in place with EBID

  • Y. Zhang, X.Y. Liu, C.H. Ru, Y.L. Zhang, L.X. Dong, and Y. Sun, "Piezoresistivity characterization of synthetic silicon nanowires using a MEMS device," IEEE/ASME J. MEMS, Vol. 20, pp. 959-967, 2011.